iEQ-Glorysoft (Shanghai) Co.,Ltd.
iEQ iEQ

Overview and System Architecture

  • Distributed Architecture Cluster Device Control Platform Software

    Componentized, visual development

    Software framework that meets industry standards for semiconductor equipment

  • Highly customizable

    Support Win7/8/10 and Linux and other operating systems, support cross-platform

Rich Application Scenarios

Features-GUI Development
  • 智能装备平台 智能装备平台
  • 智能装备平台
  • Function Introduction - Secondary Development
    • Configuration Tool

      Configuration File

    • Expansion Library (Computing)

      .NET

      Dispatch (I.E. Organize The Distribution of Vehicles)

      GUI Component

      Formulation Check

    • The platform itself can be extended to meet specific user needs

    Functions-Processing Scheduling
    • Built-in Generic Scheduling Engine

      Material-Driven, generates scheduling instructions based on the real-time status of wafer and other materials.

      Follows SEMI standard defined models for easy FA integration

      Process/Control Job

      Configurable Prioritization By Unit

      Support For External Modules (E.G. Photolithography)

      Simulation Model

    • Customizable

      Prioritization Strategy, Path Adjustment

      Mission-specific

      Clean、Dummy、Mapping,Etc.

  • Functions - IO Services
    • Built-in Generic Scheduling Engine

      Multi-node Distributed IO Services

      IO and Memory Type Variables

      Persistent Storage

      Expression Calculation Function

      Interlock Function

      Output Check (OUT_CHECK)

      Output Linkage (OUT_ACTION)

      Input Check (IN_CHECK)

      IO Configuration Tool

      Supports Browsing, Editing, Monitoring, Etc.

      Driver library and enumeration value configuration management

      Simulation Mode

Modules Offered By The Smart Equipment Platform

  • CTF

    Granite Platform

  • IEQ

    Device Communication Conversion Module

CTF Granite Platform

  • Granite Platform

    For semiconductor equipment specifically designed for domestic equipment software platform, support cross-platform deployment, distributed deployment, modular design, plug-in, support for GUI free configuration creation, easy to expand, support for customization, assisting equipment manufacturers to quickly launch the device

  • CTF (Cluster Tool Framework) Granite Platform

    FA (Fab Automation) Granite Platform FA module, interfacing with Fab automation system (EAP system or MES system).

Device Software Module

  • Industry Pain Point

    Key equipment technology is restricted by foreign countries, need to accelerate the localization process to ensure the security and stability of the supply chain

    Fierce competition, domestic equipment manufacturers need to improve technical strength and influence

    Increasingly diversified market demand for equipment, requiring rapid response and customized services

    High R&D costs and lack of specialized personnel limit technological breakthroughs and innovation capabilities

  • Enhancements For Customers

    Accelerated Equipment Product LaunchProvide equipment software package, shorten the GTM time of equipment manufacturers, and quickly respond to the market

    Enhancing The Customer ExperienceSupport for custom development, to meet the individual needs of the software after-sales protection

    Independent and ControllableExternal dependence, a number of 12-inch Fab factory mature case verification, to ensure that the system is controllable and safe.

Function

  • GUI - Human Machine Interface, Configuration Customization
  • FA -- Factory Automation (GEM/GEM300)
  • PM - Process Module
  • LPRC-Remote Procedure Call
  • ALARM-Alarm Handling
  • CTC - Scheduling, Support For Customization
  • CM-Ark Module Unit
  • RCP - Recipe Management
  • HIST-History Management
  • LOG-LoggingManagement

Industries which CTF is Applicable

  • Semiconductor

Learn More About CTF (Cluster Tool Framework) Granite Platform

iEQ Application Scenarios

Through iEQ, PLC or board data is converted into standard SECS/GEM, and communication is established with the upper system so that the upper system can do the exchange of information, data collection, process control and other responses to the functional requirements of the equipment.

iEQ应用场景

iEQ Product Advantages

  • Rich Interface and Good Compatibility

    Provide a variety of connection methods, including RJ45, USB, RS232, RS485, RS422 and other industrial interfaces

  • Expandable and Easy to Customize

    Reserve rich interfaces, support Restful, WebService, Socket, Datebase and other interaction modes.

  • Plug and Play, Easy Configuration

    Simple installation and deployment, plug and play; configuration through the WebClient, powerful, flexible configuration, real-time effective

  • Powerful, Stable and Efficient Performance

    Fully compatible with SECS/GEM standard function interface, 7x24 hours uninterrupted stable operation, high data transmission performance

  • Support Mainstream PLC, A Variety of Communication Protocols

    Supports a number of mainstream PLC manufacturers, including Mitsubishi, Omron, Siemens, Keens and so on. Covers commonly used device communication protocols such as MC protocol, Fins protocol, S7 protocol, Modbus protocol, TCP/IP protocol, serial port protocol, etc.

  • Deep Integration and Standardization of Equipment

    Deep integration with equipment, providing standard SECS/GEM interface, can be directly and seamlessly integrated with EAP/MES and other upstream systems to realize information transmission, data collection, process control and other functions

Industries which iEQ is Applicable

  • Semiconductor
  • PCB

Learn More About IEQ

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